The 5th International Symposium on Laser Precision Microfabrication

May 11 (Tue) - 14 (Fri), 2004
Nara-Ken New Public Hall, Nara, Japan

What's New!

NEW ! LPM2004 Award-Winners


Landscape of Nara "Yasushiji Temple"
The World Heritage by UNESCO ('98)
Main Hall of the Symposium site
A Noh play stage.
A Noh play
Noh is a traditional Jpn. masked drama with dance and song.
Welcome to Nara
Access to Nara
By Train
By Bus
Timetable from/to Kansai International Airport (by bus)
Timetable from/to Osaka (Itami) Airport (by bus)
Timetable at Kintetsu Kyoto Station for Nara (in Japanese)
Timetable at Kintetsu Namba Station for Nara (in Japanese)
Timetable at Kintetsu Nara Station for Kyoto and Osaka (in Japanese)
Kintetsu Railway (in Japanese)
Timetable at JR Kyoto Station for Nara (in Japanese)
Timetable at JR Nara Station for Kyoto (in Japanese)
JR Nara Station (in Japanese)
JR Kyoto Station (in Japanese)
Japan Railways Groups
Japan Rail Pass
Map of Nara
Central Nara 1
Central Nara 2
Central Nara 3
Nara-Ken New Public Hall [English] [Japanese]
Access to Nara-Ken New Public Hall [English] [Japanese]

Participant Registration Fee

(Participant Full Registration Fee includes one technical digest, one proceedings book and the banquet)

Full Registration Payment Received by 31 March 2004:
Member of JLPS/SPIE \46,000 (Japanese Yen)
Non-Member \52,000 (Japanese Yen)
Full Registration Payment Received after 31 March 2004 by 30 April 2004, or On-site:
Member of JLPS/SPIE \58,000 (Japanese Yen)
Non-Member \63,000 (Japanese Yen)
One day Ticket: \30,000 (Japanese Yen)
Student: \10,000 (Japanese Yen)
Banquet Fee:
One-day-participant and Accompanied person: \10,000 (Japanese Yen)
Student: \ 5,000 (Japanese Yen)

Please note: Banquet and proceedings is not included with student registration and one day ticket. Student registration will not be processed without a copy of your Valid Student ID. Please include with Registration form.

Hotel Accommodation

Main Hotel
Our main hotel is Mitsui Garden Hotel Nara. You can make your reservation by the LPM2004 Registration System. Please enter the system, and go to STEP 1. After completing the registration, please go forward to "Hotel Reservation Procedure," and follow the instructions.

Alternative Options
Should you prefer the alternative options for your accommodation, please refer to the following information. Upon making the hotel reservation, please directly make a contact with each hotel by yourself.
Nara Washington Hotel Plaza (Reservation Sheet )
Super Hotel (Reservation Sheet )

Submission of Manuscript

The deadline for the paper submission of all invited, oral and poster presenters is the first day of the symposium, May 11th, 2004. We invite all authors to bring their original manuscripts to the symposium site, with one original manuscript, plus two copies, instead of sending them to SPIE by mail. Camera ready manuscripts are only acceptable. Please note that for the publication of your manuscript, SPIE also needs a copyright transfer statement, which you can get from the web pages of SPIE using the given link. You can bring this form to the conference site together with your paper.
SPIE Copyright Transfer Form

Manusript Guideline [MS-Word] [pdf]

Symposium Proceedings

Symposium proceedings was published from SPIE. Please contact LPM Office at .

Publication Policy

Manuscript due dates must be strictly observed. Late manuscripts run the risk of not being published in the proceedings.

Paper Review

To ensure a high-quality conference, all submitted manuscripts will be reviewed by the Program Committee for technical merit and content prior to publication as a Proceedings of SPIE.

Aims and Scope

Miniaturization and high precision are rapidly becoming a requirement on many industrial processes and products. As result, there is greater interest in the use of laser microfabrication approaches to achieve these goals. The International Symposium on Laser Precision Microfabrication (LPM), is annually held to provide a forum for research and technology development in the area of laser micro/nanofabrication. The topics encompass novel developments in hardware, software and in the fundamental chemistry/physics that buttress laser material interaction process. The unique aspect of this conference is the interchange between fundamental research and industrial applications. LPM is held in Japan on even years and in other host countries on odd years. To date, LPM has been successfully hosted in Omiya/Japan (2000), Singapore/Singapore (2001), Osaka/Japan (2002), and Munich/Germany(2003). The 5th meeting of the LPM will be on May 2004 in the ancient Japanese capital Nara.
The aim of LPM2004 is to provide a forum for discussion on the fundamental aspects of laser/material interaction, the state of the art of laser materials processing and in the germination of next-generation ideas that arises from collaborating scientists, end users and laser manufacturers. The LPM2004 Proceedings will be published by SPIE after the event. We extend a welcome and hope that you will join us at LPM2004!


LPM 2004 covers the following topics. The special session on Glass/Ceramic processing is also planned.

1 Fundamental aspects (Dynamics, Modeling, Simulation, etc.)
2 Process monitoring and control
3 Nanotechnology
4 Direct write process (MAPLE-DW, LIFT, etc.)
5 Ultra-short pulse laser processing
6 VUV laser processing
7 Surface treatment (Texturing, Cleaning, Annealing, modification, etc.)
8 Micro-patterning and micro-structuring
9 Micro-machining
10 3-D micro- and nano-fabrication
11 Drilling and cutting
12 Welding and bonding
13 Micro-forming
14 Wafer dicing
15 Marking and trimming
16 Packaging and mounting process
17 Lithography (including EUV Source and Application)
18 Manufacture of micro devices and systems
19 Film deposition and synthesis of advanced materials (PLD, CVD, etc)
20 Nano- and micro-particles
21 Medical and biological applications
22 Optics and systems for laser microprocessing
23 Laser devices
24 Industrial applications
25 Glass/Ceramic processing (Special session, see below for more details.)
26 Others

Special Session - 1
"Laser Microfabrication of Glass/Ceramics Materials and Novel Applications"

Session Organizers: Henry Helvajian (The Aerospace Corporation), Kathleen Richardson (CREOL, School of Optics, University of Central Florida)

Lasers can play a strong role in the development of advanced technology devices and in instruments or components where glass or ceramic materials are used as the substrate in lieu of other materials. Lasers processing of glass or ceramic does not always have to be via a brute force energy deposition process. Glass chemistry and structure can be tailored for photosensitivity to enhance laser material processing at specific wavelengths permitting site-selective transformations (i.e. crystallization, phase transformation (amorphization) as well as ablation) that lead to a more controlled approach to material removal or alteration. Certain photo-structurable glass ceramic already exist and micro-fabrication experiments have shown the fidelity enhancement possible.

The LPM 2004 will host a special session that invites glass/material scientists and laser processing experts to submit papers. Papers will be accepted in research or development of glass/ceramic materials designed for optical excitation and in laser processing techniques that use photo-chemical interactions in the glass to advantage. The session will also accept contributions on topics where either the glass or the processing of the glass material via laser photochemical means is used towards realization of components with novel properties for unique applications.

Tutorials/overview for Special Session - 1:
Kathleen Richardson (University of Central Florida, USA) and Henry Helvajian (The Aerospace Corporation, USA)
Invited talks for Special Session - 1:
Denise Krol (UC Davis/LLNL, USA)
Alex Kolobov (AIST, Japan)
Stefan Nolte (Friedrich-Schiller-University Jena, Germay), "Ultrafast laser processing | new possibilities for photonic device production"
Vadim Veiko (Saint Petersburg State Institute of Fine Mechanics and Optics, Russia), "Laser modification of glass|ceramics structure and properties: the new view on to the old materials"

Special Session - 2
"High-power single-mode fiber lasers and their novel applications"

Session Organizers: Isamu Miyamoto (Osaka University), Andreas Tuennermann (Fraunhofer Institute)

Fiber lasers have a lot of advantages such as excellent beam quality, extremely high conversion efficiency and very long life time in comparison with existing lasers such as Nd:YAG lasers and CO2 lasers, and can be operated without maintenance such as water-cooling and optical alignment. Materials processing has been improved very much by the advent of high-power single-mode fiber lasers. The future progress of the laser materials processing, without any doubt, strongly depends on the advance of the fiber laser technology.

LPM2004 hosts special session of "High-power single-mode fiber lasers and applications to novel materials processing". Papers will be accepted in research or development of high-power single-mode fiber lasers with CW and pulsed operations. This session also welcomes scientists and specialists dealing with fundamentals of laser-matter interaction, and novel applications of high-power single-mode fiber lasers to microwelding, microsoldering, microcutting, microdrilling, marking, trimming, surface modifications, sintering and so on.

Invited talks for Special Session - 2:
Andreas Tuennermann (Fraunhofer IOF, Jena, Germany), "Fiber lasers and amplifiers - novel avenues to real world applications of ultrashort lasers"
Valentin Gapontsev (IPG Laser GmbH, Germany), "Fiber lasers - New opportunities in precision microfabrication-"
S. Woods (Southampton Photonics, UK), "Tailoring fiber laser specifications for applications from micro-machining (100W) to cutting (1kW)"
Isamu Miyamoto (Osaka University, Japan), "Applications of high-power single-mode fiber lasers to novel microwelding and microcutting"

Invited Speakers (Partial List)

Plenary Talks:
F. Dausinger (University of Stuttgart, Germany), "Micro machining with micro-,nano-, pico orfemtosecond pulses: European research results and applications"
K. Sugioka (RIKEN, Japan), "Three-dimensional laser microfabrication"
C. Paul Christensen (Potomac Photonics, USA), "Laser Microfabrication from a Commercial Perspective"
Invited Talks in Regular Sessions:
S. V. Garnov (A. M. Prokhorov General Physics Institute, Russia), "Ultrafast optical and electrical diagnostics of laser-induced modification oftransparent materials"
J. H. Klein-Wiele (Laser Laboratorium Gottingen e.V., Germany), "Nano-fabrication of solid materials with UV femtosecond pulses"
Femtosecond laser processing
R. Stoian (Max Born Institute (MBI), Germany), "Temporal pulse manipulation and adaptive optimization in ultrafast laser processing of materials"
J. Solis (CSIC, Spain), Waveguide structures in heavy-metal oxide glasses written with fs laser pulses"
3-D microfabrication
J. W. Perry (The University of Arizona, USA), Two-photon 3D lithography: materials and applications"
Surface microstructuring
M. Kuwahara (AIST, Japan), Volume change thermal lithography technique for ultra-high density optical ROM mastering process"
Laser micromachining and microdevice fabrication
T. Lippert (Paul Scherrer Institut, Switzerland), "Laser micromachining of optical devices"
C. Arnold (Princeton Univ., USA), "Manufacture of mesoscale energy storage systems by laser-direct write"
S. Lazare (University of Bordeaux, France), "Recent experimental and theoretical advances in microdrilling of polymers with ultraviolet laser beams"
Biological applications
K. Koenig (University Jena, Germany), "Femtoseocnd laser application in biotechnology and medicine"
Micro welding
A. Olowinsky (Fraunhofer-Institut fur Lasertechnik, Germany), "SHADOW - A new laser beam welding technology, Basics and applications"
Industrial Applications
T. Hagiwara (CMET Inc., Japan), "Current Status and Future Prospects of Laser Stereolithography"

Symposium Format

The symposium is planned as a four day event with a plenary session, a special session on Glass/Ceramic processing, both oral and poster sessions, and a table top exhibition. The special session and oral sessions, that will run as two-parallel sessions, will be comprised of invited and contributed papers.

Official Program

A Noh play and a garden party are planned for the evening of Wednesday, May 12, 2004 at Nara-Ken New Public Hall.


General Chair:
Isamu Miyamoto (Osaka Uuniversity, Japan)
Henry Helvajian (The Aerospace Corporation, USA)
Kazuyoshi Itoh (Osaka University, Japan)
Kojiro F. Kobayashi (Osaka University, Japan)
Andreas Ostendorf (Laser Zentrum Hannover, Germany)
Koji Sugioka (RIKEN, Japan)

Organizing Committee

Zhao-Gu Cheng (SIOFM, China); H. F. Dylla (Thomas Jefferson Laboratory, USA); Burkhard Fechner (Lambda Physik, Japan); Kenshi Fukumitsu (Hamamatsu Photonics, Japan), Malcom Gower (Exitech Ltd., UK); Richard F. Haglund Jr. (Vanderbilt University, USA); Peter Herman (University of Toronto, Canada); James Horwitz (Naval Research Laboratories, USA); Tony Hoult (Coherent Inc., USA); Juergen Ihlemann (Laser Laboratory Goettingen, Germany); Narumi Inoue (National Defense Academy, Japan); Takashi Ishide (Matsushita Heavy Industry, Japan); Shinichi Ishizaka (Japan Steel Works, Japan); Teruyoshi Kadoya (Trumph, Japan); Kazuo Kamada (Matsushita Electric Works, Japan); Hidehiko Karasaki (Matsushita Welding Systems Co., Ltd., Japan); Ernest W. Kreutz (Lahrsturl fur Lasertechnik; Germany); Christian Kulik (Laser Zentrum Hannover, Germany); William P. Latham (Air Force Research Laboratories, USA); J. M. Lee (IMT Co. Ltd., Korea); Y. F. Lu (University of Nebraska, USA); Hiroaki Misawa (Hokkaido University, Japan); Takashi Miyoshi (Osaka University, Japan); Sumio Nakahara (Kansai University, Japan); Hirokuni Namba (Sumitomo Electric Industry, Japan); Klaus Nowitzki (Optec Net Deutschland, Germany); Reinhart Poprawe (Lehrstuhl fur Lasertechnik, Germany); Juergen Reif (University of Cottbus, Germany); Tomokazu Sano (Osaka University, Japan) ; Masaaki Tanaka (Mitsubishi Electric, Japan); Osamu Wakabayashi (Gigaphoton, Japan); Takehiro Watanabe (Chiba University, Japan)

Program Committee

Chairman: Koji Sugioka (RIKEN, Japan)
Vice-Chairmen: Toshihiko Ooie (AIST, Japan); Hiroyuki Niino (AIST, Japan)
Carmen N. Afonso (Instituto de Optica, Spain); David Ashkenasi (LMTB Berlin, Germany); Dieter Bauerle (Johannes Kepler University Linz, Austria); Jan Dubowski (University of Sherbrooke, Canada); Friedrich Dausinger (University of Stuttgart, Germany); Corey Dunsky (Coherent Inc., USA); Gerd Esser (Bavarian Laser Zentrum, Germany); Eric Fogarassy (CNRS-PHASE, France); Costas Fotakis (FORTH-IESL, Greece); Arnold Gillner (Fraunhofer ILT, Germany); Costas Grigoropoulos (Univeristy of California, Berkeley, USA); Dennis R. Hall (Heriot-Watt University, UK); Ingolf Hertel (Max-Born Institut Berlin, Germany); Andrew Holmes (Imperial College, UK); M. H. Hong (DSI, Singapore); Willem Hoving (Philips CFT, Netherlands); Yoshiro Ito (Nagaoka University of Technology, Japan); Takahisa Jitsuno (Osaka University, Japan); Vitali Konov (GPI, Russia); C. Lee (In-Ha University, Korea); Shoji Maruo (Yokohama National University, Japan); Hiroshi Masuhara (Osaka University, Japan); Simeon Metev (BIAS, Germany); Michel Meunier (Ecole Polytechnique de Montreal, Canada); Jyunji Nishii (AIST-Kansai, Japan); Satoru Nishio (Tohoku University, Japan); Etsuji Ohmura (Osaka University, Japan); Tatsuo Okada (Kyushu University, Japan); Raj Patel (IMRA America, USA); Alan Petersen (Spectra Physics, USA); Alberto Pique (Naval Research Laboratories, USA); Michelle Shinn (Thomas Jefferson National Accelerator Facility, USA); Uwe Stamm (XTREME Technologies GmbH, Germany); Vadim Veiko (St. Petersburg Institute of Fine Mechanics and Optics, Russia); Kunihiko Washio (Paradigm Laser Research, Japan); Xian Fan Xu (Purdue University, USA)
Secretary: Kotaro Obata (RIKEN, Japan)

Steering Committee

Local Arrangement
Chairman: Akio Hirose (Osaka Univ., Japan)
Vice-Chairman: Wataru Watanabe (Osaka Univ., Japan)
Members: Yoichiro Hosokawa (Osaka Univ., Japan); Masao Kubo (Matsushita Electric Works, Ltd., Japan); Masami Mizutani (Osaka Univ., Japan); Yasuhiro Takaya (Osaka Univ., Japan); Keisuke Uenishi (Osaka Univ., Japan); Yuka Yamada (Matsushita Electric Industrial, Co.,Ltd )

Chairman: Toshihiko Ooie (AIST, Japan)
Vice-Chairman: Kenshi Fukumitsu (Hamamatsu Photonics K.K., Japan)
Members: Takanori Hino (Niihama National College of Technology, Japan); Yasuhiro Okamoto (Okayama Univ., Japan); Fumiaki Yamada (The Japan Steel Works, Ltd., Japan), Akihiro Utsumi (AIST, Japan)

Chairman: Yoshiro Ito (Nagaoka University of Technology, Japan)
Vice-Chairmen: Hidehiko Karasaki (Matsushita Welding Systems Co., Ltd., Japan); Kunihiko Washio (Paradigm Laser Research, Japan)
Members: Teruyoshi Kadoya (Trumpf Corporation, Japan); Masahide Kato (Marubun Corporation, Japan); Takahisa Jitsuno (Osaka University, Japan)

Chairman: Sumio Nakahara (Kansai University, Japan)
Vice-Chairman: Takehito Yoshida (Anan National College of Technology, Japan)
Members: Kazuo Kamada (Matsushita Electric Works, Ltd., Japan); Yoshihiro Okino (Kansai University, Japan); Ikurou Umezu (Konan University, Japan)

Chairman: Hiroyuki Niino (AIST, Japan)
Vice-Chairman: Shozui Takeno (Mitsubishi Electric Corporation, Japan)
Members: Yoshiki Nakata (Kyushu University, Japan) ; Tomokazu Sano (Osaka University, Japan)

Chairman: Etsuji Ohmura (Osaka University, Japan)
Vice-Chairman: Kiyokazu Yasuda (Osaka University, Japan)

Organized by

JLPS - Japan Laser Processing Society
RIKEN - The Institute of Physical and Chemical Research
SPIE - The International Society for Optical Engineering

Cooperating Organizations

JSAP - The Japan Society of Applied Physics
JSPE - The Japan Society for Precision Engineering
JWS - The Japan Welding Society
LSJ - The Laser Society of Japan
High Temperature Society of Japan
LIA - Laser Institute of America

Contact Information

Ms. Hiromi Teraoka (Secretary)
Tel & Fax: +81 6 6879-8642
JLPS, Miyamoto lab.
Department of Manufacturing Science
Graduate School of Engineering
Osaka University
2-1 Yamada-Oka, Suita, Osaka 565-0871, Japan