Proceedings of LPM2021

22nd International Symposium on Laser Precision Microfabrication

June 8-11, 2021 (Web Conference)

 

 

General Chair

Hiroyuki Niino, AIST-National Institute of Advanced Industrial Science and Technology, Japan

 

Co-Chairs

Yongfeng Lu, University of Nebraska-Lincoln, USA

Michael Schmidt, Friedrich-Alexander-Universität Erlangen-Nurnberg, Germany

Yasuhiro Okamoto, Okayama University, Japan

 

Honorary Chairs

Isamu Miyamoto, Osaka University, Japan

Koji Sugioka - RIKEN, Japan

 

Paper number for Quotation: #21-three digits number

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Index

 

#21-001 (Submission ID 19) Session 2: Fundamental aspects

Electron collision rate in ultrashort laser – metal interaction inferred from reflectivity measurements [PDF]

T. Genieys¹, M. Sentis¹, and O. Utéza*¹

1- Aix-Marseille University, CNRS, LP3 UMR 7341, Marseille, France

 

#21-002 (Submission ID 101) Session 2: Fundamental aspects

Formation and its mechanism of high-speed micro-grooving on metal surface by angled CW laser irradiation [PDF]

Nozomi Taura¹, Akiya Mitsunobu², Tatsuhiko Sakai³, Yasuhiro Okamoto*¹, and Akira Okada¹

1- Graduate School of Natural Science and Technology, Okayama University, Japan

2- Faculty of Engineering, Okayama University, Japan

3- Nippon SteelCorporation, Japan

 

#21-003 (Submission ID 134) Session 2: Fundamental aspects

A multi-scale model for ultra short pulsed parallel laser structuring — Part I. the micro-scale model [PDF]

C. Heinigk*¹, T. Barthels², M. Nießen², and W. Schulz²

1- Department NLD, RWTH Aachen University, Aachen, Germany

2- Fraunhofer ILT, Aachen, Germany

 

#21-004 (Submission ID 55) Session 2: Fundamental aspects

The pulse duration dependent ablation crater on Si [PDF]

Kazuki Mimura¹, Takashi Takahashi², Makoto Yamaguchi³, Yohei Kobayashi², and Takuro Tomita*¹

1- Graduate School of Sciences and Technology for Innovation, Tokushima University, Japan

2- The Institute for Solid State Physics, The University of Tokyo, Japan

3- Graduate School of engineering science, Akita University, Japan

 

#21-005 (Submission ID 81) Session 2: Fundamental aspects

Development of the AI for estimating laser power from temperature distribution [PDF]

Miki Nakaone¹, Tomomasa Ohkubo*¹, Yuki Ueno¹, Ken Goto², and Yutaka Kagawa³

1- Graduate School of Engineering, Tokyo University of Technology, Japan

2- Japan Aerospace Exploration Agency, Japan

3- Katayanagi Institute, Tokyo University of Technology, Japan

 

#21-006 (Submission ID 100) Session 3: Laser and photochemistry

Preparation and characterization of copper oxide nano-inks for high frequency femtosecond laser-induced fabrication of Cu circuit [PDF]

Yajun Huang^1,2, Xiaozhu Xie^*1,2,3, Miaoni Li ^1,2, and Deyi Ou^1,2

1- Laser Micro/Nano Processing Lab, School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China

2- State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou, China

3- Department of Experiment Teaching, Guangdong University of Technology, Guangzhou, China

 

#21-007 (Submission ID 97) Session 4: Surface Micro/Nano Structuring

Modifications induced by femtosecond laser irradiation on (001) surface of diamond crystal [PDF]

Kenya Bando¹, Tomoyuki Ueki², Hiromu Hisazawa², Takuro Tomita², Tatsuya Okada², and Makoto Yamaguchi³

1- Graduate Student, Graduate School of Science and Technology for Innovation, Tokushima University, Japan

2- Graduate School of Technology, Industrial and Social Sciences, Tokushima University, Japan

3- Graduate School of Engineering Science, Akita University, Japan

 

#21-008 (Submission ID 106) Session 4: Surface Micro/Nano Structuring

Raman studies for structural change of DLC film on Si induced by ultrafast laser ablation [PDF]

Keisuke Takabayashi¹, Khaidir Bin Khamaron¹, Takuro Tomita², Takashi Takahashi³, Yohei Kobayashi³, and Makoto Yamaguchi^*1

1- Graduate School of Engineering Science, Akita University, Japan

2- Graduate School of Sciences and Technology for Innovation, Tokushima University, Japan

3- The Institute for Solid State Physics, University of Tokyo, Japan

 

#21-009 (Submission ID 71) Session 5: Burst ablation and processing

In situ analysis of ultrashort pulsed burst ablation via transmission pump probe imaging [PDF]

Benedikt Bornschlegel^*1, Martin Kratz¹, and Johannes Finger²

1- Chair for Laser Technology – RWTH Aachen University, Aachen, Germany

2- Fraunhofer Institute for Laser Technology ILT, Aachen, Germany

 

#21-010 (Submission ID 59) Session 6: Ultra-short pulse laser processing of Glass/Ceramic

Investigation of joint condition in the ultrafast laser microwelding under changing applied pressure distribution [PDF]

Tomoki Tsuji¹ and Takayuki Tamaki^1,*2

1- Advanced Mechanical Engineering Course, Department of Systems Innovation, Faculty of Ad-vanced Engineering Control Engineering, National Institute of Technology (KOSEN), Nara College, Nara, Japan

2 Department of Control Engineering, National Institute of Technology (KOSEN), Nara College, Nara, Japan

 

#21-011 (Submission ID 166) Session 6: Ultra-short pulse laser processing of Glass/Ceramic

Time resolved pump-probe imaging of ablation phenomena in silica glass using visible femtosecond laser [PDF]

E. Terasawa^*1,2, D. Satoh^2,3, T. Shibuya³, Y. Moriai², H. Ogawa^2,3, M. Tanaka^2,3, K. Sakaue^1,4, M. Washio¹, Y. Kobayashi^2,5, and R. Kuroda^2,3

1- Waseda Research Institute for Science and Engineering, Waseda University, Japan

2- AIST-UTokyo Advanced Operando-Measurement Technology Open Innovation Laboratory (OPERANDO-OIL), National Institute of Advanced Industrial Science and Technology (AIST), Japan

3- Research Institute for Measurement and Analytical Instrumentation (RIMA), National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), Japan

4- Photon Science Center, Graduate School of Engineering, The University of Tokyo, Japan

5- The Institute for Solid State Physics, The University of Tokyo, Japan

 

#21-012 (Submission ID 79) Session 7: Nano ripple formation

Influence of the laser-beam shape on laser-induced periodic surface structures [PDF]

J. Oltmanns*^{1, #}, P.N. Terekhin^2,#, F. Kleinwort¹, A. Blumenstein¹, D.S. Ivanov^2,3,4, M.E. Garcia⁴, B. Rethfeld², J. Ihlemann¹, and P. Simon¹

1- Institut für Nanophotonik Göttingen e.V., Göttingen, Germany

2- Department of Physics and Research Center OPTIMAS, Technische Universität Kaiserslautern, Kaiserslautern, Germany

3- Quantum Electronics Division, Lebedev Physical Institute, Moscow, Russia

4- Theoretical Physics Department, University of Kassel, Kassel, Germany

#Contributed Equally

 

#21-013 (Submission ID 104) Session 7: Nano ripple formation

Effect of electrolyte on ultrashort-pulsed laser ablation [PDF]

Shuhei Kodama^*1, Godai Miyaji¹, and Wataru Natsu¹

1- Tokyo University of Agriculture and Technology, Japan

 

#21-014 (Submission ID 56) Session 7: Nano ripple formation

Spontaneous formation of the nano-periodic structures of DLC on SiC by picosecond laser irradiation [PDF]

Ken Yamamoto¹, Takashi Takahashi², Yoshiharu Utsumi³, Akinori Shibata⁴, Makoto Yamaguchi⁵, Yohei Kobayashi², and Takuro Tomita^*1

1- Graduate School of Sciences and Technology for Innovation, Tokushima University, Japan

2- Institute of Solid State Physics, The University of Tokyo, Japan

3- Nippon ITF Inc., Japan

4- NISSIN ELECTRIC CO., LTD., Japan

5- Graduate School of Engineering Science, Akita University, Japan

 

#21-015 (Submission ID 162) Session 8: Nano- and micro-particles

Preparation of Gd₂O₃:Er,Yb nanoparticles by laser ablation in liquid and their optical properties for biomedical application [PDF]

Yuri Tei^*1, Haohao Wang², Yoshitaka Kitamoto¹, Masahiko Hara¹, and Hiroyuki Wada¹

1- School of Materials and Chemical Technology, Tokyo Institute of Technology, Japan

2- Department of Physics, Nanjing Agricultural University, China

 

#21-016 (Submission ID 47) Session 8: Nano- and micro-particles

Kinetics of nanoparticles formation under UV, VIS and IR nanosecond laser irradiation of a silver-ions-enriched glass [PDF]

Ekaterina Babich^*1,2, Vladimir Kaasik^1,2, Igor Reduto³, Sergey Scherbak^1,2,4, and Andrey Lipovskii^1,2

1- Peter the Great St. Petersburg Polytechnic University, St. Petersburg, Russia

2- Alferov University, St. Petersburg, Russia

3- University of Eastern Finland, Joensuu, Finland

4- Higher School of Economics, St. Petersburg, Russia

 

#21-017 (Submission ID 128) Session 8: Nano- and micro-particles

Observation of formation of SiO₂ nanoparticle by UV pulsed laser ablation in a background gas [PDF]

Reiji Koike¹, Rio Suzuki¹, Keita Katayama¹, Mitsuhiro Higashihata¹, Hiroshi Ikenoue^1,2, and Daisuke Nakamura^*1

1- Graduate Schoolof Information Science and Electrical Engineering, Kyushu University, Japan

2- Department of Gigaphoton Next GLP, Kyushu University, Japan

 

#21-018 (Submission ID 23) Session 9: Micro-machining

Icephobic micro-textures fabricated by laser-based texturing methods [PDF]

Stephan Milles¹, Vittorio Vercillo², Sabri Alamri³, Alfredo I. Aguilar-Morales³, Tim Kunze³, Elmar Bonaccurso², and Andrés Fabián Lasagni^{*1, 3}

1- Institute for Manufacturing Technology, Technische Universität Dresden, Dresden, Germany

2- Airbus Central Research and Technology, Materials X, Willy-Messerschmitt, Taufkirchen, Germany

3- Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS, Dresden, Germany

 

#21-019 (Submission ID 22) Session 10: Surface Micro-patterning and micro-structuring (Invited paper)

Controlling surface properties by fabricating single and multi-scaled periodic surface structures [PDF]

Andrés Fabián Lasagni^*1,2, Stephan Milles¹, Felix Bouchard¹, Robert Baumann¹, Christoph Zwahr¹, Marcos Soldera^1,3 and Bogdan Voisiat¹

1- Institute for Manufacturing Technology, Technische Universität Dresden, Dresden, Germany

2- Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS, Dresden, Germany

3- PROBIEN-CONICET, Dto. de Electrotecnia, Universidad Nacional del Comahue, Neuquén, Argentina

 

#21-020 (Submission ID 27) Session 10: Surface Micro-patterning and micro-structuring

Surface modification of additive manufactured specimens by nanosecond direct laser interference patterning [PDF]

Florian Kuisat^*1, Fabian Ränke¹, Fernando Lasagni², and Andrés F. Lasagni^1,3

1- Institute for Manufacturing Technology, Technische Universität Dresden, Dresden, Germany

2- CATEC Advanced Center for Aerospace Technologies, La Rinconada, Seville, Spain

3- Fraunhofer Institute für Werkstoff- und Strahltechnik IWS, Dresden, Germany

 

#21-021 (Submission ID 68) Session 10: Surface Micro-patterning and micro-structuring

Beam shaping the direct laser interference patterning spot [PDF]

Ludwig Pongratz¹ and Kai Vannahme¹

1- Fraunhofer Institute for Laser Technology, Aachen Germany

 

#21-022 (Submission ID 32) Session 10: Surface Micro-patterning and micro-structuring

Optimized Direct Laser Interference Patterning of bearing steel based on response surface methodology [PDF]

Mikhael El-Khoury^*1, Bogdan Voisiat¹, Tim Kunze^2,3, and Andrés Fabián Lasagni^1,2

1- Institute for Manufacturing Technology, Technische Universität Dresden, Dresden, Germany

2- Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS, Dresden, Germany

3- Fusion Bionic GmbH, Dresden 01277, Germany

 

#21-023 (Submission ID 33) Session 10: Surface Micro-patterning and micro-structuring

Improving throughput and microstructure uniformity in Direct Laser Interference Patterning process utilizing diffractive focus beam shaper [PDF]

Mikhael El-Khoury^*1, Bogdan Voisiat¹, Tim Kunze^2,3, and Andrés Fabián Lasagni^1,2

1- Institute for Manufacturing Technology, Technische Universität Dresden, Dresden, Germany

2- Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS, Dresden, Germany

3- Fusion Bionic GmbH, Dresden, Germany

 

#21-024 (Submission ID 35) Session 11: Surface processing

Fabrication and optical analysis of the decorative features formed by Direct Laser Interference Patterning [PDF]

Max Menzel¹, Bogdan Voisiat*¹, and Andrés Fabián Lasagni^1,2

1- Technische Universität Dresden, Institut für Fertigungstechnik, Dresden, Germany

2- Fraunhofer-Institut für Werkstoff- und Strahltechnik (IWS), Dresden, Germany

 

#21-025 (Submission ID 60) Session 11: Surface processing

Effects of laser peening parameters on plastic deformation in aqueous glycerol solution as plasma confinement layer [PDF]

Noor Shahira Masroon^*1, Hikaru Hirata¹, Miho Tsuyama¹, Manabu Heya², and Hitoshi Nakano¹

1- Faculty of Science and Engineering, Kindai University, Japan

2- Faculty of Science and Engineering, Osaka-Sangyo University, Japan

 

#21-026 (Submission ID 63) Session 11: Surface processing

Control of plasma confinement layer for effective laser-peening [PDF]

Yang Zhang^*1, Noor Shahira binti Masroon¹, Yoshinari Namba¹, Miho Tsuyama¹, Manabu Heya², and Hitoshi Nakano¹

1- Faculty of Science and Engineering, Kindai University, Japan

2- Faculty of Engineering, Osaka-sangyo University, Japan

 

#21-027 (Submission ID 83) Session 11: Surface processing

Control of the acoustic impedance of a plasma confinement layer for laser peening [PDF]

Nor Syaza Batrisyia Nor Bahri^*1, Noor Shahira Masroon¹, Miho Tsuyama¹, Manabu Heya², and Hitoshi Nakano¹

1- Faculty of Science and Engineering, Kindai University, Japan

2- Faculty of Science and Engineering Osaka-Sangyo University, Japan

 

#21-028 (Submission ID 85) Session 11: Surface processing

Laser peening with solid-state medium having high acoustic impedance as plasma confinement layer [PDF]

Miho Tsuyama*¹, Yuki Sugimoto¹, Manabu Heya² and Hitoshi Nakano¹

1- Faculty of Science and Engineering, Kindai University, Higashi-osaka, Osaka, Japan

2- Faculty of Engineering, Osaka-sangyo University, Daito, Osaka, Japan

 

#21-029 (Submission ID 24) Session 11: Surface processing

Fabrication of superhydrophobic hierarchical textures on aluminum by combining laser-based methods [PDF]

Stephan Milles¹, Johannes Dahms¹, Marcos Soldera^1,2 and Andrés Fabián Lasagni^{*1, 3}

1- Institute for Manufacturing Technology, Technische Universität Dresden, Dresden, Germany

2- PROBIEN-CONICET, Dto. de Electrotecnia, Universidad Nacional del Comahue, Neuquén, Argentina

3- Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS, Dresden, Germany

 

#21-030 (Submission ID 29) Session 11: Surface processing

Surface roughness reduction of additive manufactured components by nanosecond pulsed laser treatment [PDF]

Florian Kuisat^*1, Fernando Lasagni², and Andrés F. Lasagni^1,3

1- Institute for Manufacturing Technology, Technische Universität Dresden, Dresden, Germany

2- CATEC Advanced Center for Aerospace Technologies, La Rinconada, Seville, Spain

3- Fraunhofer Institute für Werkstoff- und Strahltechnik IWS, Dresden, Germany

 

#21-031 (Submission ID 30) Session 11: Surface processing

Processing of hierarchical structures on stainless steel by direct laser interference patterning [PDF]

Hidenori Shimada¹, Kyohei Watanabe¹, and Masaki Yamaguchi*¹

1- Graduate School of Medicine, Science & Technology, Shinshu University, Ueda, Japan

 

#21-032 (Submission ID 96) Session 11: Surface processing

Super hydrophilic surface fabricated on alumina ceramic by ultrafast laser microprocessing [PDF]

Zhengsen Wang¹ and Yingchun Guan*^1,2,3,4

1- School of Mechanical Engineering and Automation, Beihang University, Beijing, China

2- National Engineering Laboratory of Additive Manufacturing for Large Metallic Components, Beihang University, Beijing, China

3- International Research Institute for Multidisciplinary Science, Beihang University, Beijing, China

4- Ningbo Innovation Research Institute of Beihang University, Beilun District, Zhejiang, China

 

#21-033 (Submission ID 144) Session 14: Direct writing

Investigation of mechanism of Cu₂O nanosphere bonding on metal thin films induced by irradiating femtosecond laser pulses [PDF]

Shohei Murayama¹, Kien Vu Trung Nguyen¹, Hideyuki Magara², Takahiro Nakamura², and Mizue Mizoshiri *¹

1- Department of Mechanical Engineering, Nagaoka University of Technology, Nagaoka, Niigata, Japan

2- Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, Aoba, Sendai, Japan

 

#21-034 (Submission ID 201) Session 14: Direct writing

Functional microstructures in nanoporous silicate matrix: Concept, realization, and testing [PDF]

Roman A. Zakoldaev¹, Zhong Lijing², Veronika A. Yakimuk¹, Yulia I. Yandybaeva¹, Alena S. Shishkina¹, and Olga V. Andreeva¹

1- ITMO University, St. Petersburg, Russia

2- Zhejiang Lab, Hangzhou City, Zhejiang Province, P.R. China

 

#21-035 (Submission ID 141) Session 16: Beam shaping and related techniques

Multi-beam processing with individually addressable beamlets: Calibration & data processing [PDF]

Alexander Meyer^*1 and Milena Zuric¹

1- Fraunhofer Institute for Laser Technology (ILT)

 

#21-036 (Submission ID 137) Session 16: Beam shaping and related techniques

Automatic image analysis for processing marks in femtosecond laser micromachining using concave and convex coefficient [PDF]

Daisuke Aoki¹ and Takayuki Tamaki*^1,2

1- Advanced Mechanical Engineering Course, Department of Systems Innovation, Faculty of Advanced Engineering Control Engineering, National Institute of Technology (KOSEN), Nara College, Japan

2- Department of Control Engineering, National Institute of Technology (KOSEN), Nara College, Japan

 

#21-037 (Submission ID 16) Session 17: Process monitoring and control

New approach for monitoring a DLIP process using a combination of an infrared camera and a diffraction measurement system [PDF]

Nikolai Schröder¹, Sascha Teutoburg-Weiss¹, Germán Vergara² and Andrés Fabián Lasagni^1,3

1- Technische Universität Dresden, Institut für Fertigungstechnik, Dresden, Germany

2- New Infrared Technologies, Boadilla del Monte, Madrid, Spain

3- Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS, Dresden, Germany

 

#21-038 (Submission ID 25) Session 17: Process monitoring and control

Process monitoring in laser transmission welding of plastics by using deep learning algorithms [PDF]

Nam-Phong Nguyen^*1, Chaitra Nayak¹, Maximilian Brosda¹, Alexander Olowinsky¹, Heike Leitte² and Arnold Gillner³

1- FraunhoferInstitute for Laser Technology ILT, Aachen, Germany

2- Visual Information Analysis Group, TU Kaiserslautern, Kaiserslautern, Germany

3- Chair for Laser Technology LLT, Aachen, Germany

 

#21-039 (Submission ID 212) Session 21: Additive Manufacturing

Fabrication of pure copper rod by multi-beam laser metal deposition with blue diode lasers [PDF]

Yuji Sato^*1, Kazuhiro Ono², Keisuke Takenaka², Kento Morimoto², Yoshinori Funada³, Yorihiro Yamashita⁴, Tomomasa Ohkubo⁵, Nobuyuki Abe², and Masahiro Tsukamoto²

1- Joining and Welding Research Institute, Osaka University, Japan

2- Graduate School of Engineering, Osaka University, Japan

3- Industrial Research Institute of Ishikawa, Japan

4- National Institute of Technology, Ishikawa College, Japan

5- Dept. of Mechanical Engineering, Tokyo University of Technology, Japan

 

#21-040 (Submission ID 146) Session 21: Additive Manufacturing

Defect formation in multi-laser powder bed fusion of near-alpha Ti-6.5Al-2Zr-Mo-V (TA15) alloy [PDF]

Shuhan Li¹ and Zemin Wang*¹

1- Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan, PR China

 

#21-041 (Submission ID 151) Session 21: Additive Manufacturing

Semi-empirical joint correction in 3D double-arrowhead auxetic structure verified by selective laser melting [PDF]

Xinqiang Lan¹ and Zemin Wang*¹

1- Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan, PR China

 

 

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Published on July 30, 2021

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